"Resonant frequency analysis for spring-mass structure in high-g MEMS ..."

Zhenya Geng et al. (2013)

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DOI: 10.1109/I2MTC.2013.6555456

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-01

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Zhenya Geng, Yi Shen, Miao Zhang, Muhua Li, Jing Jin:
Resonant frequency analysis for spring-mass structure in high-g MEMS accelerometer. I2MTC 2013: 440-443

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