"Chemical vapor deposition quality prediction system based on support ..."

Jui-Yiao Su, Ching-Shun Chen (2009)

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DOI: 10.1109/FUZZY.2009.5277281

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Jui-Yiao Su, Ching-Shun Chen:
Chemical vapor deposition quality prediction system based on support vector regression and fuzzy learning mechanism. FUZZ-IEEE 2009: 1965-1970

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