"Evolutionary Optimization for Plasmon-Assisted Lithography."

Caroline Prodhon et al. (2009)

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DOI: 10.1007/978-3-642-01129-0_47

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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  dblp key:
  - conf/evoW/ProdhonMYVA09
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Caroline Prodhon, Demetrio Macías, Farouk Yalaoui, Alexandre Vial, Lionel Amodeo:
Evolutionary Optimization for Plasmon-Assisted Lithography. EvoWorkshops 2009: 420-425

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