Katherine Shu-Min Li, Leon Li-Yang Chen, Ken Chau-Cheung Cheng, Peter Yi-Yu Liao, Sying-Jyan Wang, Andrew Yi-Ann Huang, Nova Cheng-Yen Tsai, Leon Chou, Gus Chang-Hung Han, Jwu E. Chen, Hsing-Chung Liang, Chun-Lung Hsu: Automatic Inspection for Wafer Defect Pattern Recognition with Unsupervised Clustering. ETS 2021: 1-2