"Improvement of epitaxial channel quality on heavily arsenic- and ..."

Yukinori Morita et al. (2014)

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DOI: 10.1109/ESSDERC.2014.6948790

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Yukinori Morita, Takahiro Mori, Shinji Migita, Wataru Mizubayashi, Koichi Fukuda, Takashi Matsukawa, Kazuhiko Endo, Shin-ichi O'Uchi, Yongxun Liu, Meishoku Masahara, Hiroyuki Ota:
Improvement of epitaxial channel quality on heavily arsenic- and boron-doped Si surfaces and impact on tunnel FET performance. ESSDERC 2014: 182-185

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