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ORCID"Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks ..."
- Richard Hudeczek, Peter Baumgartner:
Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks for Monolithic High-Q MEMS Resonator Confinement. ESSDERC 2021: 211-214
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last updated on 2021-12-24 12:03 CET by the dblp team
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