"Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor ..."

Theophile Dubreuil et al. (2023)

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DOI: 10.1109/ESSDERC59256.2023.10268513

access: closed

type: Conference or Workshop Paper

metadata version: 2025-11-18

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Theophile Dubreuil, Sylvain Barraud, Jean-Michel Pedini, Jean-Michel Hartmann, François Boulard, A. Sarrazin, Ahmed Gharbi, Johannes Sturm, Amélie Lambert, Simon Martin, Niccolo Castellani, A. Anotta, A. Magalhaes-Lucas, Aurelie Souhaite, François Andrieu:
Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor for high-density embedded memory. ESSDERC 2023: 117-120

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