"ZnO thin films produced by the RF magnetron sputtering."

Huawa Yu et al. (2011)

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DOI: 10.1109/EMEIT.2011.6023604

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-12

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Huawa Yu, Jing Wang, Yangan Yan, Xin Wang, Bin Gao, Hanchen Liu, Yali Du:
ZnO thin films produced by the RF magnetron sputtering. EMEIT 2011: 2486-2489

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