"Optimization of TSV-Induced Stress Using a Slanted Profile in a Backside ..."

Seki Hong et al. (2025)

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DOI: 10.1109/ICEIC64972.2025.10879621

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-07

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Seki Hong, Jimyoung Lee, Jongwook Jeon, Kee-Won Kwon:
Optimization of TSV-Induced Stress Using a Slanted Profile in a Backside TSV Process. ICEIC 2025: 1-3

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