"Highly-Doped Through-Contact Silicon Epi Design at 3 nm node."

Sushant Mittal et al. (2019)

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DOI: 10.1109/DRC46940.2019.9046479

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-19

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Sushant Mittal, Ashish Pal, Mehdi Saremi, J. Ferrell, M. Haverty, T. Miyashita, N. Kim, El Mehdi Bazizi, Blessy Alexander, A. B. Sachid, Buvna Ayyagari:
Highly-Doped Through-Contact Silicon Epi Design at 3 nm node. DRC 2019: 55-56

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