"First demonstration of vacuum-sealed fully integrated BEOL-compatible ..."

Nishita Deka, Vivek Subramanian (2018)

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DOI: 10.1109/DRC.2018.8442219

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Nishita Deka, Vivek Subramanian:
First demonstration of vacuum-sealed fully integrated BEOL-compatible field emission devices for Si integrated high voltage applications. DRC 2018: 1-2

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