"Large Volume Metrology Process Model: Measurability Analysis with ..."

Chun Hung Cheng et al. (2009)

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DOI: 10.1007/978-3-642-10430-5_78

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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  - conf/det/ChengHZDM09
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Chun Hung Cheng, Dehong Huo, Xi Zhang, Wei Dai, Paul G. Maropoulos:
Large Volume Metrology Process Model: Measurability Analysis with Integration of Metrology Classification Model and Feature-Based Selection Model. DET 2009: 1013-1026

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