"LLM-SRAF: Sub-Resolution Assist Feature Generation Using Large Language Model."

Tianyi Li et al. (2025)

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DOI: 10.23919/DATE64628.2025.10993108

access: closed

type: Conference or Workshop Paper

metadata version: 2026-04-07

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Tianyi Li, Zhexin Tang, Tao Wu, Bei Yu, Jingyi Yu, Hao Geng:
LLM-SRAF: Sub-Resolution Assist Feature Generation Using Large Language Model. DATE 2025: 1-7

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