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"Fracturing-aware Curvilinear ILT via Circular E-beam Mask Writer."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Xinyun Zhang et al. (2024)

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DOI: 10.1145/3649329.3655926

access: closed

type: Conference or Workshop Paper

metadata version: 2026-03-17

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  dblp key:
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  - https://dblp.org/rec/conf/dac/ZhangZCZX024
Xinyun Zhang, Su Zheng, Guojin Chen, Binwu Zhu, Hong Xu, Bei Yu:
Fracturing-aware Curvilinear ILT via Circular E-beam Mask Writer. DAC 2024: 134:1-134:6

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