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"Generic lithography modeling with dual-band optics-inspired neural networks."
Haoyu Yang et al. (2022)
- Haoyu Yang, Zongyi Li

, Kumara Sastry
, Saumyadip Mukhopadhyay, Mark Kilgard, Anima Anandkumar, Brucek Khailany, Vivek Singh, Haoxing Ren:
Generic lithography modeling with dual-band optics-inspired neural networks. DAC 2022: 973-978

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