"A Systematic Literature Review of Machine Learning Applications for ..."

Tobias Gentner et al. (2022)

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DOI: 10.1109/COMPSAC54236.2022.00169

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type: Conference or Workshop Paper

metadata version: 2025-12-07

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Tobias Gentner, Johannes Breitenbach, Timon Neitzel, Jacob Schulze, Ricardo Buettner:
A Systematic Literature Review of Machine Learning Applications for Process Monitoring and Control in Semiconductor Manufacturing. COMPSAC 2022: 1081-1086

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