"Phase Partition Based Virtual Metrology for Material Removal Rate ..."

Wenlan Jiang et al. (2021)

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DOI: 10.1007/978-3-030-93046-2_16

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-21

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Wenlan Jiang, Chunpu Lv, Tao Zhang, Huan-gang Wang:
Phase Partition Based Virtual Metrology for Material Removal Rate Prediction in Chemical Mechanical Planarization Process. CICAI 2021: 180-190

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