"Identification and visualization of robust-control-relevant model sets ..."

Tom Oomen et al. (2010)

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DOI: 10.1109/CDC.2010.5717797

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-01

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Tom Oomen, Sander Quist, Robbert van Herpen, Okko H. Bosgra:
Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. CDC 2010: 5530-5535

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