"On Synchronization of Generic Lithography Machine Open-chains using a ..."

Yazan Mohammad Al-Rawashdeh, Mohammad Al Janaideh, Marcel Heertjes (2021)

> Home

Details and statistics

DOI: 10.1109/CCTA48906.2021.9659262

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-11

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/ccta/Al-RawashdehJH21
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/ccta/Al-RawashdehJH21
Yazan Mohammad Al-Rawashdeh, Mohammad Al Janaideh, Marcel Heertjes:
On Synchronization of Generic Lithography Machine Open-chains using a Novel Fine-Positioning Stage System. CCTA 2021: 1089-1094

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.