"Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing."

Simone Pampuri et al. (2011)

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DOI: 10.1109/CASE.2011.6042425

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Simone Pampuri, Andrea Schirru, Giuseppe Fazio, Giuseppe De Nicolao:
Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing. CASE 2011: 244-249

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