"Fault detection for plasma-enhanced chemical vapor deposition process ..."

Yaw-Jen Chang (2012)

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DOI: 10.1109/COASE.2012.6386497

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-30

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Yaw-Jen Chang:
Fault detection for plasma-enhanced chemical vapor deposition process using feature extraction. CASE 2012: 491-496

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