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"Neural Networks Fusion to Overlay Control System for Lithography Process."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Jihyun Kim, Sanghyeok Seo, Sung-Shick Kim (2006)

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DOI: 10.1007/11941439_63

access: closed

type: Conference or Workshop Paper

metadata version: 2018-05-30

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  dblp key:
  - conf/ausai/KimSK06
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  - https://dblp.org/rec/conf/ausai/KimSK06
Jihyun Kim, Sanghyeok Seo, Sung-Shick Kim:
Neural Networks Fusion to Overlay Control System for Lithography Process. Australian Conference on Artificial Intelligence 2006: 587-596

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