"Efficient pattern relocation for EUV blank defect mitigation."

Hongbo Zhang et al. (2012)

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DOI: 10.1109/ASPDAC.2012.6165049

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Hongbo Zhang, Yuelin Du, Martin D. F. Wong, Rasit Onur Topaloglu:
Efficient pattern relocation for EUV blank defect mitigation. ASP-DAC 2012: 719-724

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