"PEALD Ru/RuOx films for ULSI applications and its transition control ..."

Chun-Min Zhang et al. (2013)

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DOI: 10.1109/ASICON.2013.6811922

access: closed

type: Conference or Workshop Paper

metadata version: 2025-04-22

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Chun-Min Zhang, Qing-Qing Sun, Peng-Fei Wang, David Wei Zhang:
PEALD Ru/RuOx films for ULSI applications and its transition control between metal and metal oxide. ASICON 2013: 1-4

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