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"Selective Atomic Layer Deposition to Extend Moore's Law and Beyond: ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Jin Yan et al. (2023)

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DOI: 10.1109/ASICON58565.2023.10396279

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-16

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  dblp key:
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  - https://dblp.org/rec/conf/asicon/YanGCZC23
Jin Yan, Eryan Gu, Kun Cao, Huilong Zhou, Rong Chen:
Selective Atomic Layer Deposition to Extend Moore's Law and Beyond: Surface Kinetic Tuning for Self-Aligned Growth. ASICON 2023: 1-4

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