"Oxygen-plasma-based digital etching for GaN/AlGaN high electron mobility ..."

Jingyi Wu et al. (2019)

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DOI: 10.1109/ASICON47005.2019.8983678

access: closed

type: Conference or Workshop Paper

metadata version: 2025-08-18

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Jingyi Wu, Hongyu Yu, Yang Jiang, Zeyu Wan, Siqi Lei, Wei-Chih Cheng, Guangnan Zhou, Robert Sokolovskij, Qing Wang, Guangrui Maggie Xia:
Oxygen-plasma-based digital etching for GaN/AlGaN high electron mobility transistors. ASICON 2019: 1-4

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