"A method for real-time control of thin film composition using OES and XPS."

Dong Ni et al. (2003)

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DOI: 10.1109/ACC.2003.1239773

access: closed

type: Conference or Workshop Paper

metadata version: 2021-12-06

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Dong Ni, Yiming Lou, Panagiotis D. Christofides, Lin Sha, Sandy Lao, Jane P. Chang:
A method for real-time control of thin film composition using OES and XPS. ACC 2003: 1320-1327

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