"Modeling and compensation of asymmetric hysteresis in a piezo actuated ..."

Roel J. E. Merry et al. (2009)

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DOI: 10.1109/ACC.2009.5160007

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-15

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Roel J. E. Merry, Mustafa Uyanik, René van de Molengraft, Maarten Steinbuch, Richard K. Koops, Marijn van Veghel:
Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM. ACC 2009: 967-972

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