"Model predictive control of film porosity in thin film deposition."

Gangshi Hu, Gerassimos Orkoulas, Panagiotis D. Christofides (2009)

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DOI: 10.1109/ACC.2009.5160202

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-06

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Gangshi Hu, Gerassimos Orkoulas, Panagiotis D. Christofides:
Model predictive control of film porosity in thin film deposition. ACC 2009: 4797-4804

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