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"Multi-variable adaptive control of CF4/O2 plasma ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Baris Fidan et al. (2001)

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DOI: 10.1109/ACC.2001.945899

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-05

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Baris Fidan, I. G. Rosen, Tyler Parent, Anupam Madhukar:
Multi-variable adaptive control of CF₄/O₂ plasma etching of silicon nitride thin films. ACC 2001: 1280-1285

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