"Micro-Positioning End-Stage for Precise Multi-Axis Motion Control in ..."

Yazan Mohammad Al-Rawashdeh et al. (2021)

> Home

Details and statistics

DOI: 10.23919/ACC50511.2021.9483343

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-30

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/amcc/Al-RawashdehAHJ21
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/amcc/Al-RawashdehAHJ21
Yazan Mohammad Al-Rawashdeh, Mahmoud Al-Tamimi, Marcel Heertjes, Mohammad Al Janaideh:
Micro-Positioning End-Stage for Precise Multi-Axis Motion Control in Optical Lithography Machines: Preliminary Results. ACC 2021: 40-47

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.