"Contouring accuracy improvement of a dual-axis micro-positioning stage ..."

Chun-Ming Wen, Ming-Yang Cheng, Ke-Han Su (2010)

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DOI: 10.1109/AMC.2010.5464019

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-23

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Chun-Ming Wen, Ming-Yang Cheng, Ke-Han Su:
Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. AMC 2010: 82-87

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