"A novel design of grating projecting system for 3D reconstruction of wafer ..."

Shu Yuan et al. (2006)

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DOI: 10.1117/12.650023

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-14

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Shu Yuan, Ronald Chung, Tan Zheng, Jun Cheng, Edmund Y. Lam, Kenneth S. M. Fung, Fan Wang:
A novel design of grating projecting system for 3D reconstruction of wafer bumps. Three-Dimensional Image Capture and Applications 2006: 605601

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