"Chromatic confocal detection for high-speed microtopography measurements."

Aiko K. Ruprecht et al. (2004)

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DOI: 10.1117/12.525658

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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  - conf/3dica/RuprechtKWTO04
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  - https://dblp.org/rec/conf/3dica/RuprechtKWTO04
Aiko K. Ruprecht, Klaus Körner, Tobias F. Wiesendanger, Hans J. Tiziani, Wolfgang Osten:
Chromatic confocal detection for high-speed microtopography measurements. Three-Dimensional Image Capture and Applications 2004: 53-60

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