"The dependency of TSV keep-out zone (KOZ) on Si crystal direction and ..."

Jiye Zhang et al. (2013)

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DOI: 10.1109/3DIC.2013.6702368

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-22

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Jiye Zhang, Lin Zhang, Yuanwei Dong, Hongyu Li, Cher Ming Tan, Guangrui Xia, Chuan Seng Tan:
The dependency of TSV keep-out zone (KOZ) on Si crystal direction and liner material. 3DIC 2013: 1-5

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