"Characterization of Ozone-Ethylene Radical Pretreatment for Hybrid Bonding ..."

Bungo Tanaka et al. (2024)

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DOI: 10.1109/3DIC63395.2024.10830031

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type: Conference or Workshop Paper

metadata version: 2025-01-23

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Bungo Tanaka, Tatsunori Shino, Murugesan Mariappan, Tetsu Tanaka, Takafumi Fukushima:
Characterization of Ozone-Ethylene Radical Pretreatment for Hybrid Bonding without Water Rinsing Processes. 3DIC 2024: 1-4

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