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"Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Akitsu Shigetou, Tilo H. Yang, C. Robert Kao (2019)

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DOI: 10.1109/3DIC48104.2019.9058786

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-19

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  dblp key:
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  persistent URL:
  - https://dblp.org/rec/conf/3dic/ShigetouYK19
Akitsu Shigetou, Tilo H. Yang, C. Robert Kao:
Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration. 3DIC 2019: 1-3

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