"Intermediate BEOL process influence on power and performance for 3DVLSI."

Hossam Sarhan et al. (2015)

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DOI: 10.1109/3DIC.2015.7334472

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-12

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Hossam Sarhan, Sébastien Thuries, Olivier Billoint, Fabien Deprat, Alexandre Ayres De Sousa, Perrine Batude, Claire Fenouillet-Béranger, Fabien Clermidy:
Intermediate BEOL process influence on power and performance for 3DVLSI. 3DIC 2015: TS1.3.1-TS1.3.5

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