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"Heterogeneous integration technology for MEMS-LSI multi-chip module."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Kang Wook Lee et al. (2009)

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DOI: 10.1109/3DIC.2009.5306599

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-16

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  dblp key:
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  - https://dblp.org/rec/conf/3dic/LeeKOKBFTK09
Kang Wook Lee, Shigeyuki Kanno, Yuki Ohara, Kouji Kiyoyama, Ji Chel Bea, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi:
Heterogeneous integration technology for MEMS-LSI multi-chip module. 3DIC 2009: 1-6

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