"Nano-Function materials for TSV technologies."

Hiroaki Ikeda et al. (2015)

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DOI: 10.1109/3DIC.2015.7334569

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Hiroaki Ikeda, Shigenobu Sekine, Ryuji Kimura, Koichi Shimokawa, Keiji Okada, Hiroaki Shindo, Tatsuya Ooi, Rei Tamaki, Makoto Nagata:
Nano-Function materials for TSV technologies. 3DIC 2015: TS5.3.1-TS5.3.6

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