"Clean Dicing: An Alternative Blade Dicing Technique for Minimising ..."

Akito Hiro et al. (2024)

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DOI: 10.1109/3DIC63395.2024.10830250

access: closed

type: Conference or Workshop Paper

metadata version: 2025-01-23

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Akito Hiro, Damien Jon Leech, Geert Schoofs, John Slabbekoorn, Alain Phommahaxay, Koen Kennes, Gerald Beyer, Eric Beyne:
Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration. 3DIC 2024: 1-5

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