"New optical three dimensional structure measurement method of cone shape ..."

Masahiro Aoyagi et al. (2013)

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DOI: 10.1109/3DIC.2013.6702388

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Masahiro Aoyagi, Naoya Watanabe, Motohiro Suzuki, Katsuya Kikuchi, Shunsuke Nemoto, Noriaki Arima, Misaki Ishizuka, Koji Suzuki, Toshio Shiomi:
New optical three dimensional structure measurement method of cone shape micro bumps used for 3D LSI chip stacking. 3DIC 2013: 1-5

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