3D Modelling of MEMS Components for Coupled Elastic - Electrostatic Characterization.

Thu, 01 Jan 2004 00:00:00 +0100

Oddvar Søråsen, Andreas Vogl, Xuyuan Chen, Liv Furuberg, Klaus Magnus Johansen:
3D Modelling of MEMS Components for Coupled Elastic - Electrostatic Characterization. ICMENS 2004: 509-514