A ULSI 2-D capacitance simulator for complex structures based on actual processes.

Mon, 01 Jan 1990 00:00:00 +0100

Sanae Fukuda, Naoyuki Shigyo, Koichi Kato, Shin Nakamura:
A ULSI 2-D capacitance simulator for complex structures based on actual processes. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 9(1): 39-47 (1990)