Creep as a reliability problem in MEMS.

Thu, 01 Jan 2004 00:00:00 +0100

Robert Modlinski, Ann Witvrouw , Petar Ratchev, Anne Jourdain, Veerle Simons, H. A. C. Tilmans, Jaap M. J. den Toonder , Robert Puers , Ingrid De Wolf:
Creep as a reliability problem in MEMS. Microelectron. Reliab. 44(9-11): 1733-1738 (2004)