CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application.

Fri, 01 Jan 2021 00:00:00 +0100

Wei Xu , Xiaoyi Wang , Ruijie Wang, Izhar, Jingcui Xu , Yi-Kuen Lee :
CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application. IEEE Trans. Ind. Electron. 68(5): 4468-4476 (2021)