A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks.

Fri, 01 Jan 2021 00:00:00 +0100

Sinyoung Kim, Jaeyeon Jang , Chang Ouk Kim :
A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks. J. Intell. Manuf. 32(8): 2267-2280 (2021)