Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures.

Fri, 01 Jan 2010 00:00:00 +0100

Tamotsu Nishino, Masatake Hangai , Yukihisa Yoshida, Sang-Seok Lee:
Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures. IEICE Trans. Electron. 93-C(7): 1111-1118 (2010)