Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab.

Sun, 01 Jan 2012 00:00:00 +0100

Nan Wang, Fu-Li Hsiao, Moorthi Palaniapan, Chengkuo Lee :
Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. NEMS 2012: 326-330